发明名称 Meßanordnung
摘要 The invention relates to a measuring array having a radiation source (10), a deflecting device (5) arranged downstream thereof, which can be hit by a ray (2) coming out of the radiation source (1) and which deflects said ray successively in time in different directions. Said array also comprises a first and a second optical device (9, 10) and a detector (6), wherein the first optical device (9) deflects the rays coming from the deflecting device (5) in the form of measuring rays to a point (P) of a sample (11) that is to be arranged in a measuring position in such a way that the angle of incidence of the measuring ray on the sample (11) varies depending on the direction. The sample rays coming out of the sample (11) due to the interaction between the measuring rays and the sample are deflected by the second optical device (10) onto the detector (11). At least one of the two optical devices (9, 10) has a diffracting element (7) for deflection, said element diffracting the incident rays coming from different directions in such a way that the rays diffracted in a given diffraction order are focused on a point (P, D).
申请公布号 DE10146944(A1) 申请公布日期 2003.04.10
申请号 DE20011046944 申请日期 2001.09.24
申请人 CARL ZEISS JENA GMBH 发明人 STEINER, REINHARD;BISCHOFF, JOERG;DOBSCHAL, HANS-JUERGEN
分类号 G01J3/18;G01J3/06;G01J3/10;G01N21/21;G01N21/27;G01N21/47;G01N21/55;(IPC1-7):G01N21/41;G01B9/02;G01J4/04 主分类号 G01J3/18
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