DIAPHRAGM VALVE FOR A FLUID CIRCUIT

摘要

An open/close valve construction for use in solid-state fluid transport circuits having discrete fluid passageways formed in rigid substrates with a substrate land between port regions of the fluid passageways. The valve construction comprises a diaphragm disk having a dome portion overlying the substrate land and port regions and having a self-restoring resilience sufficient to maintain its dome configuration against substantial line vacuum. A valve actuator is located above the dome portion and spring biased to compress the dome into a flat configuration closing the port regions. Means for negating the spring force are provided to allow the dome portion to restore its configuration and open the valve.