发明名称 OPTICAL DEVICE USING SOLID IMMERSION LENS
摘要 PROBLEM TO BE SOLVED: To reduce image distortion by reducing sample dragging quantity by an SIL about an optical device using a solid immersion lens. SOLUTION: This optical device is provided with a vibration exciting means 5 for forcedly vibrating at least either solid immersion lens 1 or sample stage 2 provided in the optical device.
申请公布号 JP2003107358(A) 申请公布日期 2003.04.09
申请号 JP20010297786 申请日期 2001.09.27
申请人 FUJITSU LTD 发明人 NAGAI TOSHIAKI
分类号 G02B21/00;(IPC1-7):G02B21/00 主分类号 G02B21/00
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