发明名称 |
Calibration method for magnetically enhanced reactive ion etcher |
摘要 |
A method of calibrating the magnetic coils of a magnetically enhanced reactive ion etcher includes taking magnetic field measurements outside of a closed plasma chamber and correlating such measurements to the magnetic field within the chamber. One or more factors are established which when applied to measurements taken externally yield results representative of measurements taken internally.
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申请公布号 |
US6545468(B2) |
申请公布日期 |
2003.04.08 |
申请号 |
US20010920913 |
申请日期 |
2001.08.02 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
KUO HUI MING;CHENG STRELLSON |
分类号 |
H01J37/32;(IPC1-7):G01R33/02;G01R31/06;H01L21/66;H05H1/02;C23F1/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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