| 摘要 |
A fluid delivery line is configured to provide slurry to a planarization process, e.g., of a planarization machine. Slurry within the delivery line is provided successive forward and reverse flows. Preferably, the flow reversals are performed on a supply side of a metering pump which is used for dispensing slurry from the delivery line to a planarization pad of the planarization machine. In another embodiment, a slurry distribution system comprises a pump configured to flow slurry from a slurry reservoir to a forward delivery line. A plurality of drop lines tap into the forward line along its length. A return line returns slurry from the forward line to the slurry reservoir. A variable volume cavity is coupled in fluid communication with the return line, and is operated with plus/minus volume displacements. Additionally, a passive or active mixer may be disposed in-line with the return line and at a location between the slurry reservoir and the variable volume cavity.
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