| 摘要 |
PURPOSE: To highly accurately and stably carry out a visual inspection by suppressing reflection from a stage. CONSTITUTION: The stage 11 is constituted of a transmission material which passes illumination light 14 from an illuminator 12. The transmission material has a base of transparent ceramic having a high hardness and an abrasion resistance. A transmitted light removing means 20 is provided behind the stage 11 to remove transmitted light 14a which transmits the stage. When the transmitted light 14a transmitting the stage 11 hits an inclined face 21c through a plane of incidence 21a of a right-angle prism 21, the removing means 20 reflects the transmitted light 14a by the inclined face 21c at right angles towards an emission plane 21b to be a reflecting light 14b, and the reflecting light 14b is further absorbed by a polarizing plate 23 and is prevented from returning to the stage 11.
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