OPTICAL MODULATOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An optical modulator and a method for manufacturing the same are provided to disperse stress generated due to a mechanical driving of ribbons to an oxide film by forming straight type ribbons and the oxide film, thereby securing the stability of the mechanical driving. CONSTITUTION: An insulating layer(51) and an oxide film(52) are deposited on a silicon substrate(50) in order. A center part of the oxide film is etched to expose the insulating layer. A lower electrode(53) is formed in the center of the insulating layer by depositing and patterning tungsten. Amorphous silicon is deposited and is patterned to form amorphous silicon patterns which is a sacrificial layer. A plurality of straight type ribbons(55) are formed by depositing a nitride film. A plurality of upper electrodes(56) are formed on the ribbons by depositing and patterning aluminum. The amorphous silicon is selectively removed to form an air layer.