| 摘要 |
PROBLEM TO BE SOLVED: To stabilize and clarify a photographed image of an inspection object in a photographing inspection field of electronic parts and the like for improving precision of good/defect determination. SOLUTION: A light guide body 2 is mounted on the back face side of a workpiece 1 set in a workpiece locking part 11 on a turntable 3, and a light radiating part 7 is arranged at a clearance 9 on the lower face side of the light guide body 2 position just in front of the photographing camera 8. The light radiating part 7 and a halogen light source 5 are connected together via an optical fiber 6. The whole of the light guide body 2 is illuminated by the light radiated to the lower face of the light guide body 2 from the light radiating part 7 via the clearance 9, and the workpiece 1 is uniformly irradiated from its back face side. In this way, an image taken by the photographing camera 8 is stabilized and clarified, and consequently, precision of good/defect determination can be improved.
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