发明名称 METHOD AND DEVICE FOR WIRE BONDING
摘要 PROBLEM TO BE SOLVED: To enable bonding with a small loop height by shortening the length of a recrystallized part of a conductive wire. SOLUTION: A method for wire bonding comprises: the first process that a voltage necessary for dielectric breakdown between an ignition electrode 12 and a tip of a wire 1 is impressed to them in between; the second process that a voltage necessary for maintaining a discharge current value A1 needed to form a metal ball 2 is impressed; and the third process that a discharge current value A2 necessary for maintaining a state where the metal wire 1 is melted and a small discharge current value A3 necessary for maintaining the discharge are turned on by alternately switching the currents.
申请公布号 JP2003100796(A) 申请公布日期 2003.04.04
申请号 JP20010289986 申请日期 2001.09.21
申请人 SHIBAURA MECHATRONICS CORP 发明人 KOMAKI YUJI
分类号 H01L21/60 主分类号 H01L21/60
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