摘要 |
<p>PROBLEM TO BE SOLVED: To provide a solar battery device having superior yield and higher conversion efficiency. SOLUTION: In a solar battery module, where a p-type a-Si semiconductor layer 3 is formed on an n-type single-crystal silicon substrate 1 via an i-type a-Si semiconductor layer 2, trenches 11 having constant intervals are formed on the front side of the n-type substrate 1, a recessed part 12, which slants toward a substrate side to the surface of the substrate from the vertical direction, is arranged at least on one side of side wall parts of the trenches 11, and a collecting electrode 6 is formed on the recessed part 12.</p> |