Coating substrates by cathode atomization involves using diode cathodes supplied with high frequency energy at suitable selected or variable frequency on falling leg of self-bias curve

摘要

The method involves using diode cathodes supplied with high frequency energy at a suitable selected or variable frequency. The frequency is adjusted or regulated to the falling leg of the self-bias curve so that a predefined voltage is set up. The voltage is selected to give a maximum coating rate AN Independent claim is also included for the following: an arrangement for implementing the coating method.