摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable thermal head capable of maintaining the electric resistance value of a heat generating resistor, or the like substantially constantly over a long term. SOLUTION: In a thermal head having a plurality of heat generating resistors 3 made of a TiSiO-based resistive material adhered on the upper surface of a base plate 1 such that the heat generating resistors 3 are covered with a protection layer 5, the protection layer 5 is formed by successively laminating a first layer 6 made of an inorganic material containing an SiO and/or an SiN, a second layer 7 made of a sintered compact of a perhydropolysilazane, and a third layer 8 made of an inorganic material containing an SiN and/or an SiC.
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