| 摘要 |
PROBLEM TO BE SOLVED: To provide an antireflection film having a DLC film which is thin and can maintain sufficient durability in an antireflection film having a DLC film used as a protective film. SOLUTION: In the antireflection film essentially comprising an antireflection film applied on the surface of a base material and a protective film applied on the surface of the antireflection film, a DLC film having 1 nm to 20 nm film thickness and containing fluorine by 0.01 to 2.0 atomic ratio of F/C is formed as the protective film by vacuum thin film deposition techniques using a mixture gas of a hydrocarbon and hydrogen fluoride or a hydrocarbon and carbon fluoride. Preferably, the fluorine content is continuously increased in the thickness direction of the DLC film from the antireflection film side to the air side. |
