Semiconductor inspection device

摘要

A semiconductor inspection circuit on which a semiconductor device is set in inspecting whether the semiconductor is good or bad is provided with semiconductor inspection circuit units from the first to the M-th (M: an integer not smaller than 2) for each inspecting the semiconductor device in terms of inspection items (inspection processes), which are different from each other, and judges the semiconductor device in terms of the inspection items from the first to the M-th in accordance with the inspection outputs outputted from the semiconductor inspection circuit units from the first to the M-th to obtain judgment results from the first to the M-th.