发明名称 METHOD OF MANUFACTURING THIN FILM HAVING ORIENTED CRYSTAL AXIS
摘要 PROBLEM TO BE SOLVED: To form a thin film having oriented crystal axis of titanium oxide or a metal titanate compound on a various substrate by a simple process. SOLUTION: A method of forming the thin film having an oriented crystal axis comprises a process for obtaining a layered titanic acid in which 90 to 100% of A and/or M ions, wherein A and M are different to each other and are each a monovalent to trivalent metal, are substituted with hydrogen ions by acid treating a layered titanate expressed by general formula: Ax My Dz Ti2-(y+z) O4 , wherein; D means the defect part of Ti; x is a positive real number and is >0 and <1.0; y and z are each a positive real number satisfying the formula: 0<y+z<1.0, a process for obtaining a suspension containing flaky titanic acid separated between layers by allowing a basic compound to act to a slurry of the layered titanic acid, a process for forming a thin film on a substrate by coating the substrate with the suspension containing the flaky titanic acid and drying the coated suspension, and a process for subjecting the thin film formed on the substrate to hydrothermal treatment to obtain a thin film of titanium oxide.
申请公布号 JP2003095789(A) 申请公布日期 2003.04.03
申请号 JP20010284954 申请日期 2001.09.19
申请人 OTSUKA CHEM CO LTD 发明人 HIYO KI;YANAGISAWA KAZUMICHI;MATSUNAGA HARUE
分类号 C01G23/00;C01G23/047;C01G23/053;C30B29/16;(IPC1-7):C30B29/16 主分类号 C01G23/00
代理机构 代理人
主权项
地址