| 摘要 |
PROBLEM TO BE SOLVED: To lay out the arrangement of a vapor condensation sensor and a temperature sensor freely in manufacturing a vapor condensation preventer while reducing the number of steps of manufacturing process. SOLUTION: A vapor condensation sensor 2 and a first temperature sensor 3 for measuring the environmental temperature of the vapor condensation sensor 2 are arranged on the same substrate 8. Interdigital counter electrodes 9 for the vapor condensation sensor 2 and a temperature measuring resistor 12 for the temperature sensor 3 are formed by one process step for sputtering the same material, i.e., platinum (Pt). Furthermore, formation of electrode parts 10 and 13 and connection of lead wires are carried out by one process step.
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