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发明名称
摘要
申请公布号	JP2003512715(A)	申请公布日期	2003.04.02
申请号	JP20000586979	申请日期	1999.12.06
申请人		发明人
分类号	C23C16/18;C23C16/40;C23C16/448;C23C16/56;H01L21/314;H01L21/316;(IPC1-7):H01L21/316	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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