| 发明名称 |
LEWIS BASE ADDUCTS OF ANHYDROUS MONONUCLEAR TRIS(BETA-DIKETONATE) BISMUTH COMPOSITIONS FOR DEPOSITION OF BISMUTH-CONTAINING FILMS, AND METHOD OF MAKING THE SAME |
| 摘要 |
<p>A solvent composition useful for liquid delivery MOCVD, comprising toluene and a Lewis base, wherein toluene is present at a concentration of from about 75% to about 98% by volume, based on the total volume of toluene and the Lewis base. Such solvent composition is usefully employed to dissolve or suspend precursors therein for liquid delivery MOCVD, e.g., MOCVD of ferroelectric material films such as SBT.</p> |
| 申请公布号 |
EP1068214(B1) |
申请公布日期 |
2003.04.02 |
| 申请号 |
EP19990950139 |
申请日期 |
1999.10.04 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
BAUM, THOMAS;DUBOIS, RAYMOND, H. |
| 分类号 |
C07C49/92;C07F9/94;C23C16/18;C23C16/40;H01L21/316;(IPC1-7):C07F9/94 |
主分类号 |
C07C49/92 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
