发明名称 Illumination and imaging device for multiple spectral regions, and coordinate measuring machine having an illumination and imaging device for multiple spectral regions
摘要 An illumination and imaging device (2) for multiple spectral regions comprises an objective (21) that defines an optical axis (20). A beam splitter module (32) is arranged in the optical axis (20). Multiple light sources (35), from each of which an illuminating beam path (35a, 35b, 35c) proceeds, are associated with the beam splitter module (32). Also provided are multiple detectors (34), associated with each of which is an imaging beam path (34a, 34b). The illuminating beam paths (35a, 35b, 35c) and imaging beam paths (34a, 34b) have a common optical path segment in which the beam splitter module (32) is arranged. The illumination and imaging device (2) can advantageously be used in a coordinate measuring machine (1).
申请公布号 US6542251(B2) 申请公布日期 2003.04.01
申请号 US20010934686 申请日期 2001.08.23
申请人 LEICA MICROSYSTEMS WETZLAR GMBH 发明人 MUELLER-RENTZ ARNOLD
分类号 G01B11/00;G01B11/03;G02B27/00;H01L21/027;(IPC1-7):G01B11/14 主分类号 G01B11/00
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