| 摘要 |
PURPOSE: A wafer lift pin is provided to minimize a loss of time by controlling and exchanging the height of the wafer lift pin without decoupling a chuck. CONSTITUTION: A wafer lift pin includes a support portion(110), a pin portion(140), and a combination portion(120). The first male screw is formed on a surface of the support portion(110) in order to fix the support portion(110) and a bellows. The first female screw is formed on an inner wall of the bellows. The support portion(110) has the thickness corresponding to the depth of a lower groove. A groove including the first female screw is formed on a center of an upper portion of the support portion(110) in order to fix the pin portion(140). The pint portion(140) has a cylindrical shape. The second male screw is formed at a lower portion of the pin portion(140). The second male screw is combined with the first female screw and the second female screw of a combination hole. The combination portion(120) is used for fixing the combination of the pin portion(140) and the support portion(110).
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