TEMPERATURE CONTROL UNIT FORMED ON CHEMICAL LINE FOR PHOTO PROCESS OF SEMICONDUCTOR

摘要

PURPOSE: A temperature control unit formed on a chemical line for photo process of a semiconductor is provided to control accurately and effectively temperature of a chemical line by using a semiconductor electronic device. CONSTITUTION: A temperature control element(370) is installed on a chemical line(320) of an upper portion of a nozzle(340). The temperature control element(370) is installed nearly to the nozzle(340) for injecting chemicals in order to control the temperature of the chemicals according to a reference temperature of a temperature control unit(300). The temperature control element(370) is used for controlling accurately the temperature of the chemicals. A temperature control sensor(360) is installed at the temperature control element(370) in order to check an operating state of the temperature control element(370) and the temperature of the chemical line(320).