| 摘要 |
PURPOSE: A semiconductor optical modulator is provided to keep an interference optical path regular and to simplify the manufacturing process by forming the vertically layered structure with two optical waveguide arms in a modulator arm area. CONSTITUTION: A semiconductor optical modulator consists of an input optical waveguide area(2), a modulator arm area(3) and an output optical waveguide area(4). The input/output optical waveguide areas receive input/output optical waveguide layers(5,6) used as cores respectively. The areas are divided into upper clad layers and upper clad layers centering on the inserted optical waveguide layers. The input/output optical waveguide layers have thickness getting smaller in the forward direction of light in the input optical waveguide area and getting larger in the forward direction in the output optical waveguide area. In the modulator arm, upper/lower optical waveguide layers(7,9) are layered vertically with a p-type metal contact layer(8) having a low band gap energy in the middle. Thereby, the interference optical path is kept regular.
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