| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that pattern layout of a conventional leading-out electrode cannot be symmetric and uniform on a flexible part, in a triaxial semiconductor sensor wherein four piezo resistance elements for each axis are installed in the flexible part, so that difference is generated in internal stress due to an electrode thin film which is applied to the four piezo resistance elements, thermal stress due to environmental temperature change, etc., and therefor an offset voltage is large and fluctuates. SOLUTION: In this semiconductor acceleration sensor by the same manufacturing process as that of the leading-out electrode, an electrode thin film pattern of the same width is newly installed, so that the electrode thin film pattern layout of the flexible part region for forming the piezo resistance elements is made uniform in both the detection axial direction and the direction vertical to the detection axial direction. |
