发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent a semiconductor element and a circuit board from being broken due to a thermal stress by a method wherein an insulative filler is impregnated in an insulative resin. CONSTITUTION:A first insulative resin 3 is applied on a semiconductor element 1 having bump electrodes 2 and a second insulative resin 5 with an insulative filler 4 dispersed therein is injected on a region, where the bump electrodes of the element 1 do not exist, to push away the resin 3. After that, the element 1 is mounted and pressed on a circuit board 6 in such a way that the electrodes 2 correspond to wiring electrodes 7 of the board 6, the resins 3 and 5 are hardened in a state that the element 1 in pressed and thereafter, the pressing is removed and the element 1 is connected to the board 6. That is, as the insulative filler is dispersed in the resin 5, the thermal expansion coefficient of the resin 5 is reduced. Thereby, when a temperature change is generated in the whole system, a thermal stress which is generated between the resin 5 and the element 1 or the board 6 can be reduced and the element and the board 6 can be prevented from being broken.
申请公布号 JPH03209840(A) 申请公布日期 1991.09.12
申请号 JP19900004857 申请日期 1990.01.12
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 OCHI TAKAO;FUJIMOTO HIROAKI;HATADA KENZO
分类号 H01L21/60;H01L21/321;H01L21/56;H01L23/12 主分类号 H01L21/60
代理机构 代理人
主权项
地址