发明名称 |
COMPOUND SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING THE SAME, LIGHT-EMITTING ELEMENT, LAMP, AND TRANSISTOR |
摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a boron phosphide layer which is formed on a conventional silicon single-crystal substrate having a 1.0.0.}, 1.1.0.}, or 1.1.1.} crystalline surface as the surface results in a poor crystalline layer containing a number of crystalline defects such as dislocation and defects on stacked layers. SOLUTION: Silicon single-crystal is used for the substrate which has a (1.1.0) crystal layer inclined at an angle of 9 degrees ( deg.) to 15 degrees ( deg.) in [1.0.0.] crystal orientation. A boron phosphide (BP) semiconductor layer containing boron (B) and phosphorus (P) as constituent elements is formed on a surface of the substrate. |
申请公布号 |
JP2003092259(A) |
申请公布日期 |
2003.03.28 |
申请号 |
JP20010282631 |
申请日期 |
2001.09.18 |
申请人 |
SHOWA DENKO KK |
发明人 |
OKANO TAICHI;UDAGAWA TAKASHI |
分类号 |
C23C16/18;H01L21/20;H01L21/205;H01L33/16;H01L33/32 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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