RUN-TO-RUN CONTROL METHOD FOR PROPORTIONAL-INTEGRAL-DERIVATIVE (PID) CONTROLLER TUNING FOR RAPID THERMAL PROCESSING (RTP)

摘要

A method is provided, the method comprising measuring at least one parameter characteristic of rapid thermal processing performed on a workpiece in a rapid thermal processing step, and modeling the at least one characteristic parameter measured using a first-principles radiation model. The method also comprises applying the first-principles radiation model to modify the rapid thermal processing performed in the rapid thermal processing step.