Haftsystem für optische Membrane

摘要

A method of assembling an optical pellicle including a pellicle frame and a pellicle membrane comprising: (a) selecting a pellicle frame corresponding to the shape of the desired pellicle; (b) applying an adhesive containing a first solvent to the pellicle frame; (c) heating the pellicle frame to evaporate the first solvent; (d) fabricating the pellicle membrane; (e) applying a second solvent to the adhesive on the pellicle frame. The second solvent is a mixture of at least two solvents with boiling points which differ by at least 10[deg]C; and (f) mounting the pellicle membrane to the adhesive in the pellicle frame.