| 摘要 |
There is provided an apparatus for manufacturing substrates with transparent conductive films, which is capable of preventing occurrence of abnormal discharge and making feed rollers thereof durable. A carrier supports a tray holding an insulated substrate via support members each formed by a hollow cylindrical member (separator element) and a hollow cylindrical member (support element). The carrier is transported by feed rollers 38 whose axles are not made of a ceramic material but made of a metal higher in rigidity, in an atmosphere of vaporized particles of an ITO sintered body. The hollow cylindrical members (separators) separate the atmosphere of vaporized particles from outer surfaces of the hollow cylindrical members (support elements) to form a labyrinth in a path of migration and attachment of the vaporized particles.
|
