发明名称 |
IMAGE SENSOR WITH RECESSED PLANARIZING LAYERS AND METHOD FOR MAKING SAME |
摘要 |
The invention concerns a method for making image sensors, and in particular colour image sensors. The image sensor comprises a zone (MP) whereon is located a photosensitive matrix on which is projected the image to be converted into electric signals, and an outer zone (ZE) including peripheral electronic circuits, for controlling the matrix or for processing image signals. After forming on a substrate (30) a stack of conductive layers and insulating layers for producing the matrix and the peripheral circuits, it consists in removing only in the zone (MP) of the matrix a substantial thickness of insulation before depositing a mosaic of coloured filters, so as to reduce the height H1 of the filters relative to the photosensitive zones, thereby improving contrast and colorimetry. |
申请公布号 |
WO03026016(A2) |
申请公布日期 |
2003.03.27 |
申请号 |
WO2002FR03079 |
申请日期 |
2002.09.10 |
申请人 |
ATMEL GRENOBLE S.A.;BRISSOT, LOUIS;SOLLIER, AMEDEE |
发明人 |
BRISSOT, LOUIS;SOLLIER, AMEDEE |
分类号 |
H01L23/367;H01L25/07;H01L27/146;H04N5/335 |
主分类号 |
H01L23/367 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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