MICROELECTRONIC SYSTEM WITH INTEGRAL CYROCOOLER, AND ITS FABRICATION AND USE

摘要

A microelectronic system (20) includes a substrate (22) that is preferably silicon and a microelectronic device (24) supported on the substrate (22). The microelectronic device (24) may be a light sensor that include a readout integrated circuit formed in the silicon substrate (22), and a light detector (28) supported on and electrically interconnected with the readout integrated circuit (26). A cryocooler (30) formed in and integral with the substrate (22) includes a gas inflow channel (36) formed in the substrate (22), an expansion nozzle (42) formed in the substrate (22) and receiving a gas flow from the gas inflow channel (36), and a gas outflow channel (48) that receives the gas flow from the outlet of the expansion nozzle (42). The gas inflow channel (36) and the gas outflow channel (48) may be countercurrent spirals.