发明名称 Alignment of silicon die
摘要 In accordance with the present invention, a method is described which facilitates heat transfer from a silicon die after the silicon die is bonded to a substrate. An alignment tool is used to align the spacer with the silicon die. A thermal conductor can be placed on the silicon layer after the silicon layer has been bonded to the substrate layer. A die interface is not necessarily applied between the silicon die and the thermal conductor. A spacer is used between the substrate and the thermal conductor. The spacer can facilitate heat transfer from the die. The spacer can facilitate force transfer from the thermal lid to the die. The spacer allows a thermal conductor to be affixed to the silicon die without use of a die interface. An alignment tool is used to align the spacer with the silicon die.
申请公布号 US2003057575(A1) 申请公布日期 2003.03.27
申请号 US20010965704 申请日期 2001.09.26
申请人 GEKTIN VADIM 发明人 GEKTIN VADIM
分类号 H01L23/10;H01L23/367;H01L23/433;H01L23/544;(IPC1-7):H01L23/12;H01L21/44;H01L21/48;H01L21/50 主分类号 H01L23/10
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