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发明名称
ELECTRONIC MICROCOMPONENT, SENSOR AND ACTUATOR INCORPORATING SAME
摘要
申请公布号
EP1295384(A1)
申请公布日期
2003.03.26
申请号
EP20010949575
申请日期
2001.06.28
申请人
PHS MEMS
发明人
VALENTIN, FRANCOIS
分类号
B81B3/00;G01P15/125;H01L29/84;H02N1/00;(IPC1-7):H02N1/00
主分类号
B81B3/00
代理机构
代理人
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