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发明名称
THIN FILM PROCESSING METHOD AND THIN FILM PROCESSING APPARATUS
摘要
申请公布号
KR20030024664(A)
申请公布日期
2003.03.26
申请号
KR20027015050
申请日期
2002.11.09
申请人
发明人
分类号
H01L21/31;H01L21/20;H01L21/208;H01L21/268;H01L21/336;H01L29/786
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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