| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam machining method by which an unnecessary cleavage is not caused on the surface of a work and the surface is not melted. SOLUTION: The laser beam machining method comprises a first process for forming a reformed region 7 based on multiphoton absorption in the work 1 along the intended cutting line of the work 1 by adjusting the condenser focus P in the inside of ht work 1 and by irradiating the work 1 with a laser beam L, and a second process, after the first process, for causing stress at places where the work 1 is cut along the intended cutting line 5 by heating the work 1 so that the temperature of the work 1 becomes higher than that of the work 1 when the reformed region 7 is formed.</p> |
