发明名称 Laser optical apparatus
摘要 There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform.In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.
申请公布号 US6538819(B2) 申请公布日期 2003.03.25
申请号 US20010823043 申请日期 2001.03.29
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 TANAKA KOICHIRO
分类号 G02B27/00;B23K26/073;G02B3/00;G02B3/06;G02B5/02;H01L21/027;(IPC1-7):G02B27/10 主分类号 G02B27/00
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