,申请号JP19960184714-传众专利搜索

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发明名称
摘要
申请公布号	JP3389014(B2)	申请公布日期	2003.03.24
申请号	JP19960184714	申请日期	1996.07.15
申请人		发明人
分类号	B24B9/00;H01L21/304;(IPC1-7):B24B9/00	主分类号	B24B9/00
代理机构		代理人
主权项
地址

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