LIQUID DROP DISCHARGE HEAD AND MANUFACTURE METHOD THEREOF, MICRO DEVICE, INK-JET HEAD, INK CARTRIDGE, AND INK-JET PRINTING DEVICE
摘要
<p>A liquid drop discharge head includes a chip (21) that is formed by separation of a silicon wafer (20). The silicon wafer (20) has a first direction and a second direction which are mutually intersected. The chip (21) is separated from the silicon wafer (20) by etching the wafer along a separation line (22) parallel to the first direction of the wafer and by dicing the wafer (20) along a separation line (23) parallel to the second direction of the wafer.</p>
