| 摘要 |
PROBLEM TO BE SOLVED: To provide an automated guided vehicle in which the work for transferring a wafer between stations can be performed surely and smoothly by a sheeting machine even if the station itself or its floor surface is inclined due to installation error, manufacturing error, or the like. SOLUTION: The automated guided vehicle 1 comprises a traveling section 2 provided with traveling wheels 9, 9, etc., a sheeting machine 5 and a working section 3 provided with a buffer cassette 6 wherein the working section 3 can oscillate up and down with respect to the traveling section 2. The automated guided vehicle 1 further comprises a servo motor 14 for oscillating the working section 3 with respect to the traveling section 2, and a control section 27 of the servo motor 14 and the sheeting machine 5 is provided with a transfer hand 31 for supporting an article. The control section 27 controls the servo motor 14 such that the surface 31a of the transfer hand 31 for supporting the wafer 10 becomes substantially parallel with the mounting face (shelf 23b) of the wafer 10 on a stocker 22. |
