发明名称 METHOD AND APPARATUS TO REDUCE EFFECTS OF SHEARED WAVEFRONTS ON INTERFEROMETRIC PHASE MEASUREMENTS
摘要 The present invention features an anamorphic apparatus (200) that alters a wavefront of a beam having a wavefront error to form a beam comprising a region having a greatly reduced wavefront error. A beam stop (240) may be used with the anamorphic apparatus to define a portion of the region having a greatly reduced wavefront error that is subsequently detected or launched into a fiber optic. Furthermore, the anamorphic apparatus (200) can be incorporated into an interferometry system to reduce errors associated with wavefront error and beam shear, i.e., non-cyclic non-linearities.
申请公布号 WO03005067(A3) 申请公布日期 2003.03.20
申请号 WO2002US20560 申请日期 2002.06.27
申请人 ZYGO CORPORATION;HILL, HENRY, A. 发明人 HILL, HENRY, A.
分类号 G01B9/02;G03F7/20 主分类号 G01B9/02
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