发明名称 |
Method for processing specimens, an apparatus therefor and a method of manufacture of a magnetic head |
摘要 |
A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.
|
申请公布号 |
US2003052079(A1) |
申请公布日期 |
2003.03.20 |
申请号 |
US20020279906 |
申请日期 |
2002.10.25 |
申请人 |
YOSHIOKA KEN;TORII YOSHIMI;FUYAMA MORIAKI;OKADA TOMOHIRO;KANAI SABUROU;USUI TAKEHITO;HARATA HITOSHI |
发明人 |
YOSHIOKA KEN;TORII YOSHIMI;FUYAMA MORIAKI;OKADA TOMOHIRO;KANAI SABUROU;USUI TAKEHITO;HARATA HITOSHI |
分类号 |
H01L21/306;C23F4/00;G11B5/127;G11B5/31;G11B5/40;H01F41/14;(IPC1-7):C23F1/00 |
主分类号 |
H01L21/306 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|