| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor light emitting element which is superior in reliability and has a wide range of oscillation wavelength. SOLUTION: A semiconductor light emitting element manufacturing process comprises a diffraction grating forming process of forming a plurality of diffraction gratings in rows on a semiconductor substrate and a heating process of heating the semiconductor substrate with a heater through the intermediary of a thermal conductivity varying part 50 which varies thermal conductivity between the semiconductor substrate and the heater for each demarcated region of the semiconductor substrate and is interposed between the semiconductor substrate and the heater when crystals are grown on the semiconductor substrate provided with the diffraction gratings.
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