| 摘要 |
A semiconductor integrated circuit device includes: Si substrate; multilevel interconnect layer formed on the Si substrate; and dielectric layer formed on the multilevel interconnect layer. External-component-connecting wire, ordinary wire, fuse wire, stepper alignment mark, and target mark are formed out of an identical copper film in the uppermost metal layer. External-component-connecting pad electrode, testing-processing alignment mark, and stepper alignment mark are formed out of an identical aluminum alloy film on the dielectric film. In laser-machining the fuse wire, alignment using the target mark formed in the metal layer including the fuse wire reduces alignment errors caused from the machining.
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