ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTION HEAD, INK CARTRIDGE AND INK JET RECORDER

摘要

PROBLEM TO BE SOLVED: To solve a problem that an electrode material, the bonding strength, and the like are limited in order to prevent residual charges. SOLUTION: Insulation films 11 and 17 are provided, respectively, on the opposite surfaces of the diaphragms 10 on a first substrate 1 and the electrodes 15 on a second substrate 2 except the bonding face of the first substrate 1 and the second substrate 2.