| 摘要 |
PURPOSE: A cluster in the stack structure is provided to obtain the productivity of two clusters by mounting a single cluster by stacking two conveying chambers without increasing any space occupation. CONSTITUTION: A cluster in the stack structure includes a storing part for storing a plurality of substrates and incorporating a robot for inserting and withdrawing the substrates, a first cluster part(200) and a second cluster part(300). Each of The first and second cluster parts includes a first or second conveying chamber(210,310) incorporating a robot, a plurality of processing chambers(260-280,360-380) coupled with the first or second conveying chamber, and a first or second load lock chamber(240,340) of which an end is connected to the storing part and the other end is coupled with the first or the second conveying chamber. The second conveying chamber is positioned below the first conveying chamber. The plurality of processing chambers coupled with the second conveying chamber are positioned alternately with the processing chambers coupled with the first conveying chamber.
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