Apparatus and method for generation of a plasma torch,申请号EP19970309774-传众专利搜索

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发明名称	Apparatus and method for generation of a plasma torch
摘要
申请公布号	EP0847231(B1)	申请公布日期	2003.03.19
申请号	EP19970309774	申请日期	1997.12.04
申请人	APPLIED MATERIALS, INC.	发明人	YE, YAN
分类号	H05H1/30;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46	主分类号	H05H1/30
代理机构		代理人
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