发明名称 Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence
摘要 The present invention relates to methods and apparatus for plating a conductive material on a substrate surface in a highly desirable manner. The invention removes at least one additive adsorbed on the top portion of the workpiece more than at least one additive disposed on a cavity portion, thereby allowing plating of the conductive material take place before the additive fully re-adsorbs onto the top portion and causing greater plating of the cavity portion relative to the top portion.
申请公布号 US6534116(B2) 申请公布日期 2003.03.18
申请号 US20000740701 申请日期 2000.12.18
申请人 NUTOOL, INC. 发明人 BASOL BULENT
分类号 C25D5/02;C25D17/00;H01L21/288;H01L21/768;(IPC1-7):B05D5/12;B05D3/00;C25D5/18;C25D3/38 主分类号 C25D5/02
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