PARTICULATE CAPTURING EQUIPMENT AND PLASMA TREATING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a particulate capturing equipment which is capable of improving the capturing ability of the particulate included in gas. SOLUTION: The particulate capturing equipment disposed at a vent pipe to which an evacuating apparatus is connected is furnished with a vessel 21 which has a first juncture 23 connected with the evacuating apparatus and a second juncture connected with the vent pipe, a hollow filter mounting member 26 which is disposed in this vessel, is airtightly connected to the first juncture and is provided with a filter 33 on its peripheral wall and a flow control member 35 which is disposed in the vessel and revolves the gas sucked by the suction force of the evacuating apparatus from the vent path into the vessel 21 along the circumference of the filter mounting member 26 before the gas flows out of the inside of the vessel and after passing the filter.