| 摘要 |
PURPOSE: A wafer lifting unit is provided to improve yield and save money by preventing a process error and an undesired disposition of a wafer that are caused by a lift pin colliding against the inner wall of a susceptor hole. CONSTITUTION: A lift pin guide(202) is of a ring type. A plurality of lift pins(204) have a protrusion protruding upward, installed in the lift pin guide at regular intervals. A guide groove is formed in the lift pin guide at regular intervals. The lift pin gears with the guide groove and is fixed to the guide groove by a coupling unit. The coupling unit is composed of a bolt and a washer.
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