| 摘要 |
PROBLEM TO BE SOLVED: To provide an LED array that can be adjusted in luminous intensity after all steps end, can prevent the disconnection of electrodes by preventing part of a normal mesa from being scooped out, and is high in quality and reliability. SOLUTION: A semiconductor layer 2 of one conductivity type, another semiconductor layer 3 of the opposite conductivity type, and a discrete electrode 4 are formed on a high-resistance silicon substrate 1, and a common electrode 5 is connected onto the extended part of the semiconductor layer 2. An aimed luminous intensity is obtained by adjusting the thickness of a second ohmic contact layer by light etching after the last step ends. |
