Semiconductor device and test device for same

摘要

Realized is a semiconductor device that test can be effectively conducted by the test device even where the semiconductor device is reduced in chip size and hence pad pitch. A plurality of pads are formed on both ends of a semiconductor substrate. An input pad group is arranged at a left end side of the semiconductor device while an input/output pad groups are arranged at a right end side thereof. A BIST circuit is arranged at an upper right area of the semiconductor device, and the pads close to the BIST circuit serve as BIST exclusive pads. Because the area for arranging the pads for BIST is limited due to the increase of input pads and the like and all the pads for BIST cannot be arranged at one end of the semiconductor device, the BIST pads are separately provided in both ends of the semiconductor substrate. Those close to the BIST circuit are provided as exclusive pads while the others are as common-use pads. The pads 3a and 3b are separated to the upper and lower areas of the semiconductor device. There is no need to form a multiplicity of beams only in the upper or lower area of a test device, thus eliminating a problem of strength and a difficulty in fabrication.